10/17/2012	9:20:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/17/2012	9:20:33 AM	Recipe started at 9:20 AM
10/17/2012	9:20:33 AM	Helium valve closed
10/17/2012	9:20:33 AM	H2 valve closed
10/17/2012	9:20:33 AM	BCl3 valve closed
10/17/2012	9:20:33 AM	PH3 valve closed
10/17/2012	9:20:33 AM	SiCl4 pre valve closed
10/17/2012	9:20:33 AM	SiCl4 post valve closed
10/17/2012	9:20:33 AM	Main Vac valve closed
10/17/2012	9:20:33 AM	Bypass valve closed
10/17/2012	9:20:33 AM	Bubbler valve closed
10/17/2012	9:20:33 AM	Helium MFC set to  0.000000
10/17/2012	9:20:33 AM	H2 MFC set to  0.000000
10/17/2012	9:20:33 AM	BCl3 MFC set to  0.000000
10/17/2012	9:20:33 AM	PH3 MFC set to  0.000000
10/17/2012	9:20:33 AM	SiCl4 MFC set to  0.000000
10/17/2012	9:20:33 AM	Bypass solenoid MFC set to  0.000000
10/17/2012	9:20:34 AM	Tube furnace set to 0
10/17/2012	9:20:37 AM	H2 valve closed
10/17/2012	9:20:37 AM	BCl3 valve closed
10/17/2012	9:20:37 AM	PH3 valve closed
10/17/2012	9:20:37 AM	SiCl4 pre valve closed
10/17/2012	9:20:37 AM	SiCl4 post valve closed
10/17/2012	9:20:37 AM	Main Vac valve closed
10/17/2012	9:20:37 AM	Bypass valve closed
10/17/2012	9:20:37 AM	Bubbler valve closed
10/17/2012	9:20:37 AM	Helium valve opened
10/17/2012	9:20:37 AM	Helium MFC set to  500.000000
10/17/2012	9:20:37 AM	H2 MFC set to  0.000000
10/17/2012	9:20:37 AM	BCl3 MFC set to  0.000000
10/17/2012	9:20:37 AM	PH3 MFC set to  0.000000
10/17/2012	9:20:37 AM	SiCl4 MFC set to  0.000000
10/17/2012	9:20:37 AM	Bypass solenoid MFC set to  0.000000
10/17/2012	9:20:37 AM	Tube furnace set to 0
10/17/2012	9:21:50 AM	Helium valve closed
10/17/2012	9:21:50 AM	H2 valve closed
10/17/2012	9:21:50 AM	BCl3 valve closed
10/17/2012	9:21:50 AM	PH3 valve closed
10/17/2012	9:21:50 AM	SiCl4 pre valve closed
10/17/2012	9:21:50 AM	SiCl4 post valve closed
10/17/2012	9:21:50 AM	Main Vac valve closed
10/17/2012	9:21:50 AM	Bypass valve closed
10/17/2012	9:21:50 AM	Bubbler valve closed
10/17/2012	9:21:50 AM	Helium MFC set to  0.000000
10/17/2012	9:21:50 AM	H2 MFC set to  0.000000
10/17/2012	9:21:50 AM	BCl3 MFC set to  0.000000
10/17/2012	9:21:50 AM	PH3 MFC set to  0.000000
10/17/2012	9:21:50 AM	SiCl4 MFC set to  0.000000
10/17/2012	9:21:50 AM	Bypass solenoid MFC set to  0.000000
10/17/2012	9:21:50 AM	Tube furnace set to 0
10/17/2012	9:21:51 AM	Run finished at 9:21 AM
10/17/2012	9:21:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/17/2012	9:24:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2012	9:24:26 AM	Recipe started at 9:24 AM
10/17/2012	9:24:26 AM	Helium valve closed
10/17/2012	9:24:26 AM	H2 valve closed
10/17/2012	9:24:26 AM	BCl3 valve closed
10/17/2012	9:24:26 AM	PH3 valve closed
10/17/2012	9:24:26 AM	SiCl4 pre valve closed
10/17/2012	9:24:26 AM	SiCl4 post valve closed
10/17/2012	9:24:26 AM	Main Vac valve closed
10/17/2012	9:24:26 AM	Bubbler valve closed
10/17/2012	9:24:26 AM	Bypass valve opened
10/17/2012	9:24:26 AM	Helium MFC set to  0.000000
10/17/2012	9:24:26 AM	H2 MFC set to  0.000000
10/17/2012	9:24:26 AM	BCl3 MFC set to  0.000000
10/17/2012	9:24:26 AM	PH3 MFC set to  0.000000
10/17/2012	9:24:26 AM	SiCl4 MFC set to  0.000000
10/17/2012	9:24:26 AM	Bypass solenoid MFC set to  0.000000
10/17/2012	9:24:26 AM	Tube furnace set to 0
10/17/2012	9:25:45 AM	Helium valve closed
10/17/2012	9:25:45 AM	H2 valve closed
10/17/2012	9:25:45 AM	BCl3 valve closed
10/17/2012	9:25:45 AM	PH3 valve closed
10/17/2012	9:25:45 AM	SiCl4 pre valve closed
10/17/2012	9:25:45 AM	SiCl4 post valve closed
10/17/2012	9:25:45 AM	Main Vac valve closed
10/17/2012	9:25:45 AM	Bubbler valve closed
10/17/2012	9:25:45 AM	Bypass valve opened
10/17/2012	9:25:45 AM	Helium MFC set to  0.000000
10/17/2012	9:25:45 AM	H2 MFC set to  0.000000
10/17/2012	9:25:45 AM	BCl3 MFC set to  0.000000
10/17/2012	9:25:45 AM	PH3 MFC set to  0.000000
10/17/2012	9:25:45 AM	SiCl4 MFC set to  0.000000
10/17/2012	9:25:45 AM	Bypass solenoid MFC set to  0.000000
10/17/2012	9:25:45 AM	Tube furnace set to 0
10/17/2012	9:26:45 AM	Helium valve closed
10/17/2012	9:26:45 AM	H2 valve closed
10/17/2012	9:26:45 AM	BCl3 valve closed
10/17/2012	9:26:45 AM	PH3 valve closed
10/17/2012	9:26:45 AM	SiCl4 pre valve closed
10/17/2012	9:26:45 AM	SiCl4 post valve closed
10/17/2012	9:26:45 AM	Bypass valve closed
10/17/2012	9:26:45 AM	Bubbler valve closed
10/17/2012	9:26:45 AM	Main Vac valve opened
10/17/2012	9:26:45 AM	Helium MFC set to  0.000000
10/17/2012	9:26:45 AM	H2 MFC set to  0.000000
10/17/2012	9:26:45 AM	BCl3 MFC set to  0.000000
10/17/2012	9:26:45 AM	PH3 MFC set to  0.000000
10/17/2012	9:26:45 AM	SiCl4 MFC set to  0.000000
10/17/2012	9:26:45 AM	Bypass solenoid MFC set to  0.000000
10/17/2012	9:26:45 AM	Tube furnace set to 0
10/17/2012	9:26:46 AM	Run finished at 9:26 AM
10/17/2012	9:26:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2012	9:58:13 AM	Tube furnace set to 200
10/17/2012	10:52:36 AM	Main Vac valve closed
10/17/2012	10:52:47 AM	Main Vac valve opened
10/17/2012	10:53:54 AM	Tube furnace set to 0
10/17/2012	10:54:20 AM	Recipe started at 10:54 AM
10/17/2012	10:54:20 AM	Helium valve closed
10/17/2012	10:54:20 AM	H2 valve closed
10/17/2012	10:54:20 AM	BCl3 valve closed
10/17/2012	10:54:20 AM	PH3 valve closed
10/17/2012	10:54:20 AM	SiCl4 pre valve closed
10/17/2012	10:54:20 AM	SiCl4 post valve closed
10/17/2012	10:54:20 AM	Main Vac valve closed
10/17/2012	10:54:20 AM	Bypass valve closed
10/17/2012	10:54:20 AM	Bubbler valve closed
10/17/2012	10:54:20 AM	Helium MFC set to  0.000000
10/17/2012	10:54:20 AM	H2 MFC set to  0.000000
10/17/2012	10:54:20 AM	BCl3 MFC set to  0.000000
10/17/2012	10:54:20 AM	PH3 MFC set to  0.000000
10/17/2012	10:54:20 AM	SiCl4 MFC set to  0.000000
10/17/2012	10:54:20 AM	Bypass solenoid MFC set to  0.000000
10/17/2012	10:54:20 AM	Tube furnace set to 0
10/17/2012	10:54:23 AM	Helium valve closed
10/17/2012	10:54:23 AM	BCl3 valve closed
10/17/2012	10:54:23 AM	PH3 valve closed
10/17/2012	10:54:23 AM	SiCl4 pre valve closed
10/17/2012	10:54:23 AM	SiCl4 post valve closed
10/17/2012	10:54:23 AM	Main Vac valve closed
10/17/2012	10:54:23 AM	Bypass valve closed
10/17/2012	10:54:23 AM	Bubbler valve closed
10/17/2012	10:54:23 AM	H2 valve opened
10/17/2012	10:54:23 AM	Helium MFC set to  0.000000
10/17/2012	10:54:23 AM	H2 MFC set to  500.000000
10/17/2012	10:54:23 AM	BCl3 MFC set to  0.000000
10/17/2012	10:54:23 AM	PH3 MFC set to  0.000000
10/17/2012	10:54:23 AM	SiCl4 MFC set to  0.000000
10/17/2012	10:54:23 AM	Bypass solenoid MFC set to  0.000000
10/17/2012	10:54:24 AM	Tube furnace set to 0
10/17/2012	10:55:36 AM	Helium valve closed
10/17/2012	10:55:36 AM	BCl3 valve closed
10/17/2012	10:55:36 AM	PH3 valve closed
10/17/2012	10:55:36 AM	SiCl4 pre valve closed
10/17/2012	10:55:36 AM	SiCl4 post valve closed
10/17/2012	10:55:36 AM	Main Vac valve closed
10/17/2012	10:55:36 AM	Bypass valve closed
10/17/2012	10:55:36 AM	H2 valve opened
10/17/2012	10:55:36 AM	Bubbler valve opened
10/17/2012	10:55:36 AM	Helium MFC set to  0.000000
10/17/2012	10:55:36 AM	H2 MFC set to  500.000000
10/17/2012	10:55:36 AM	BCl3 MFC set to  0.000000
10/17/2012	10:55:36 AM	PH3 MFC set to  0.000000
10/17/2012	10:55:36 AM	SiCl4 MFC set to  0.000000
10/17/2012	10:55:36 AM	Bypass solenoid MFC set to  0.000000
10/17/2012	10:55:36 AM	Tube furnace set to 0
10/17/2012	10:55:37 AM	Helium valve closed
10/17/2012	10:55:37 AM	BCl3 valve closed
10/17/2012	10:55:37 AM	PH3 valve closed
10/17/2012	10:55:37 AM	SiCl4 pre valve closed
10/17/2012	10:55:37 AM	SiCl4 post valve closed
10/17/2012	10:55:37 AM	Main Vac valve closed
10/17/2012	10:55:37 AM	Bypass valve closed
10/17/2012	10:55:37 AM	H2 valve opened
10/17/2012	10:55:37 AM	Bubbler valve opened
10/17/2012	10:55:37 AM	Helium MFC set to  0.000000
10/17/2012	10:55:37 AM	H2 MFC set to  500.000000
10/17/2012	10:55:37 AM	BCl3 MFC set to  0.000000
10/17/2012	10:55:37 AM	PH3 MFC set to  0.000000
10/17/2012	10:55:37 AM	SiCl4 MFC set to  0.000000
10/17/2012	10:55:37 AM	Bypass solenoid MFC set to  0.000000
10/17/2012	10:55:37 AM	Tube furnace set to 1000
10/17/2012	11:15:37 AM	Helium valve closed
10/17/2012	11:15:37 AM	PH3 valve closed
10/17/2012	11:15:37 AM	Main Vac valve closed
10/17/2012	11:15:37 AM	Bypass valve closed
10/17/2012	11:15:37 AM	H2 valve opened
10/17/2012	11:15:37 AM	BCl3 valve opened
10/17/2012	11:15:37 AM	SiCl4 pre valve opened
10/17/2012	11:15:37 AM	SiCl4 post valve opened
10/17/2012	11:15:37 AM	Bubbler valve opened
10/17/2012	11:15:37 AM	Helium MFC set to  0.000000
10/17/2012	11:15:37 AM	H2 MFC set to  450.000000
10/17/2012	11:15:37 AM	BCl3 MFC set to  1.500000
10/17/2012	11:15:37 AM	PH3 MFC set to  0.000000
10/17/2012	11:15:37 AM	SiCl4 MFC set to  50.000000
10/17/2012	11:15:37 AM	Bypass solenoid MFC set to  0.000000
10/17/2012	11:15:37 AM	Tube furnace set to 1000
10/17/2012	11:35:37 AM	Helium valve closed
10/17/2012	11:35:37 AM	BCl3 valve closed
10/17/2012	11:35:37 AM	PH3 valve closed
10/17/2012	11:35:37 AM	SiCl4 pre valve closed
10/17/2012	11:35:37 AM	SiCl4 post valve closed
10/17/2012	11:35:37 AM	Main Vac valve closed
10/17/2012	11:35:37 AM	Bypass valve closed
10/17/2012	11:35:37 AM	H2 valve opened
10/17/2012	11:35:37 AM	Bubbler valve opened
10/17/2012	11:35:37 AM	Helium MFC set to  0.000000
10/17/2012	11:35:37 AM	H2 MFC set to  500.000000
10/17/2012	11:35:37 AM	BCl3 MFC set to  0.000000
10/17/2012	11:35:37 AM	PH3 MFC set to  0.000000
10/17/2012	11:35:37 AM	SiCl4 MFC set to  0.000000
10/17/2012	11:35:37 AM	Bypass solenoid MFC set to  0.000000
10/17/2012	11:35:37 AM	Tube furnace set to 950
10/17/2012	11:37:37 AM	Helium valve closed
10/17/2012	11:37:37 AM	BCl3 valve closed
10/17/2012	11:37:37 AM	PH3 valve closed
10/17/2012	11:37:37 AM	SiCl4 pre valve closed
10/17/2012	11:37:37 AM	SiCl4 post valve closed
10/17/2012	11:37:37 AM	Main Vac valve closed
10/17/2012	11:37:37 AM	Bypass valve closed
10/17/2012	11:37:37 AM	H2 valve opened
10/17/2012	11:37:37 AM	Bubbler valve opened
10/17/2012	11:37:37 AM	Helium MFC set to  0.000000
10/17/2012	11:37:38 AM	H2 MFC set to  500.000000
10/17/2012	11:37:38 AM	BCl3 MFC set to  0.000000
10/17/2012	11:37:38 AM	PH3 MFC set to  0.000000
10/17/2012	11:37:38 AM	SiCl4 MFC set to  0.000000
10/17/2012	11:37:38 AM	Bypass solenoid MFC set to  0.000000
10/17/2012	11:37:38 AM	Tube furnace set to 900
10/17/2012	11:39:38 AM	Helium valve closed
10/17/2012	11:39:38 AM	BCl3 valve closed
10/17/2012	11:39:38 AM	PH3 valve closed
10/17/2012	11:39:38 AM	SiCl4 pre valve closed
10/17/2012	11:39:38 AM	SiCl4 post valve closed
10/17/2012	11:39:38 AM	Main Vac valve closed
10/17/2012	11:39:38 AM	Bypass valve closed
10/17/2012	11:39:38 AM	H2 valve opened
10/17/2012	11:39:38 AM	Bubbler valve opened
10/17/2012	11:39:38 AM	Helium MFC set to  0.000000
10/17/2012	11:39:38 AM	H2 MFC set to  500.000000
10/17/2012	11:39:38 AM	BCl3 MFC set to  0.000000
10/17/2012	11:39:38 AM	PH3 MFC set to  0.000000
10/17/2012	11:39:38 AM	SiCl4 MFC set to  0.000000
10/17/2012	11:39:38 AM	Bypass solenoid MFC set to  0.000000
10/17/2012	11:39:38 AM	Tube furnace set to 850
10/17/2012	11:41:38 AM	H2 valve closed
10/17/2012	11:41:38 AM	BCl3 valve closed
10/17/2012	11:41:38 AM	PH3 valve closed
10/17/2012	11:41:38 AM	SiCl4 pre valve closed
10/17/2012	11:41:38 AM	SiCl4 post valve closed
10/17/2012	11:41:38 AM	Main Vac valve closed
10/17/2012	11:41:38 AM	Bypass valve closed
10/17/2012	11:41:38 AM	Helium valve opened
10/17/2012	11:41:38 AM	Bubbler valve opened
10/17/2012	11:41:38 AM	Helium MFC set to  500.000000
10/17/2012	11:41:38 AM	H2 MFC set to  0.000000
10/17/2012	11:41:38 AM	BCl3 MFC set to  0.000000
10/17/2012	11:41:38 AM	PH3 MFC set to  0.000000
10/17/2012	11:41:38 AM	SiCl4 MFC set to  0.000000
10/17/2012	11:41:38 AM	Bypass solenoid MFC set to  0.000000
10/17/2012	11:41:38 AM	Tube furnace set to 800
10/17/2012	11:43:38 AM	H2 valve closed
10/17/2012	11:43:38 AM	BCl3 valve closed
10/17/2012	11:43:38 AM	PH3 valve closed
10/17/2012	11:43:38 AM	SiCl4 pre valve closed
10/17/2012	11:43:38 AM	SiCl4 post valve closed
10/17/2012	11:43:38 AM	Main Vac valve closed
10/17/2012	11:43:38 AM	Bypass valve closed
10/17/2012	11:43:38 AM	Helium valve opened
10/17/2012	11:43:38 AM	Bubbler valve opened
10/17/2012	11:43:38 AM	Helium MFC set to  500.000000
10/17/2012	11:43:38 AM	H2 MFC set to  0.000000
10/17/2012	11:43:38 AM	BCl3 MFC set to  0.000000
10/17/2012	11:43:38 AM	PH3 MFC set to  0.000000
10/17/2012	11:43:38 AM	SiCl4 MFC set to  0.000000
10/17/2012	11:43:38 AM	Bypass solenoid MFC set to  0.000000
10/17/2012	11:43:38 AM	Tube furnace set to 750
10/17/2012	11:45:38 AM	H2 valve closed
10/17/2012	11:45:38 AM	BCl3 valve closed
10/17/2012	11:45:38 AM	PH3 valve closed
10/17/2012	11:45:38 AM	SiCl4 pre valve closed
10/17/2012	11:45:38 AM	SiCl4 post valve closed
10/17/2012	11:45:38 AM	Main Vac valve closed
10/17/2012	11:45:38 AM	Bypass valve closed
10/17/2012	11:45:38 AM	Helium valve opened
10/17/2012	11:45:38 AM	Bubbler valve opened
10/17/2012	11:45:38 AM	Helium MFC set to  500.000000
10/17/2012	11:45:38 AM	H2 MFC set to  0.000000
10/17/2012	11:45:39 AM	BCl3 MFC set to  0.000000
10/17/2012	11:45:39 AM	PH3 MFC set to  0.000000
10/17/2012	11:45:39 AM	SiCl4 MFC set to  0.000000
10/17/2012	11:45:39 AM	Bypass solenoid MFC set to  0.000000
10/17/2012	11:45:39 AM	Tube furnace set to 0
10/17/2012	12:05:39 PM	Helium valve closed
10/17/2012	12:05:39 PM	H2 valve closed
10/17/2012	12:05:39 PM	BCl3 valve closed
10/17/2012	12:05:39 PM	PH3 valve closed
10/17/2012	12:05:39 PM	SiCl4 pre valve closed
10/17/2012	12:05:39 PM	SiCl4 post valve closed
10/17/2012	12:05:39 PM	Main Vac valve closed
10/17/2012	12:05:39 PM	Bypass valve closed
10/17/2012	12:05:39 PM	Bubbler valve closed
10/17/2012	12:05:39 PM	Helium MFC set to  0.000000
10/17/2012	12:05:39 PM	H2 MFC set to  0.000000
10/17/2012	12:05:39 PM	BCl3 MFC set to  0.000000
10/17/2012	12:05:39 PM	PH3 MFC set to  0.000000
10/17/2012	12:05:39 PM	SiCl4 MFC set to  0.000000
10/17/2012	12:05:39 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	12:05:39 PM	Tube furnace set to 0
10/17/2012	12:05:40 PM	Helium valve closed
10/17/2012	12:05:40 PM	H2 valve closed
10/17/2012	12:05:40 PM	BCl3 valve closed
10/17/2012	12:05:40 PM	PH3 valve closed
10/17/2012	12:05:40 PM	SiCl4 pre valve closed
10/17/2012	12:05:40 PM	SiCl4 post valve closed
10/17/2012	12:05:40 PM	Main Vac valve closed
10/17/2012	12:05:40 PM	Bubbler valve closed
10/17/2012	12:05:40 PM	Bypass valve opened
10/17/2012	12:05:40 PM	Helium MFC set to  0.000000
10/17/2012	12:05:40 PM	H2 MFC set to  0.000000
10/17/2012	12:05:40 PM	BCl3 MFC set to  0.000000
10/17/2012	12:05:40 PM	PH3 MFC set to  0.000000
10/17/2012	12:05:40 PM	SiCl4 MFC set to  0.000000
10/17/2012	12:05:40 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	12:05:40 PM	Tube furnace set to 0
10/17/2012	12:06:38 PM	Helium valve closed
10/17/2012	12:06:38 PM	H2 valve closed
10/17/2012	12:06:38 PM	BCl3 valve closed
10/17/2012	12:06:38 PM	PH3 valve closed
10/17/2012	12:06:38 PM	SiCl4 pre valve closed
10/17/2012	12:06:38 PM	SiCl4 post valve closed
10/17/2012	12:06:38 PM	Main Vac valve closed
10/17/2012	12:06:38 PM	Bubbler valve closed
10/17/2012	12:06:38 PM	Bypass valve opened
10/17/2012	12:06:38 PM	Helium MFC set to  0.000000
10/17/2012	12:06:38 PM	H2 MFC set to  0.000000
10/17/2012	12:06:38 PM	BCl3 MFC set to  0.000000
10/17/2012	12:06:38 PM	PH3 MFC set to  0.000000
10/17/2012	12:06:38 PM	SiCl4 MFC set to  0.000000
10/17/2012	12:06:38 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	12:06:38 PM	Tube furnace set to 0
10/17/2012	12:07:38 PM	Helium valve closed
10/17/2012	12:07:38 PM	H2 valve closed
10/17/2012	12:07:38 PM	BCl3 valve closed
10/17/2012	12:07:38 PM	PH3 valve closed
10/17/2012	12:07:38 PM	SiCl4 pre valve closed
10/17/2012	12:07:38 PM	SiCl4 post valve closed
10/17/2012	12:07:38 PM	Bypass valve closed
10/17/2012	12:07:38 PM	Bubbler valve closed
10/17/2012	12:07:38 PM	Main Vac valve opened
10/17/2012	12:07:38 PM	Helium MFC set to  0.000000
10/17/2012	12:07:38 PM	H2 MFC set to  0.000000
10/17/2012	12:07:38 PM	BCl3 MFC set to  0.000000
10/17/2012	12:07:38 PM	PH3 MFC set to  0.000000
10/17/2012	12:07:38 PM	SiCl4 MFC set to  0.000000
10/17/2012	12:07:38 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	12:07:38 PM	Tube furnace set to 0
10/17/2012	12:07:39 PM	Run finished at 12:07 PM
10/17/2012	12:28:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/17/2012	12:28:24 PM	Recipe started at 12:28 PM
10/17/2012	12:28:24 PM	Helium valve closed
10/17/2012	12:28:24 PM	H2 valve closed
10/17/2012	12:28:24 PM	BCl3 valve closed
10/17/2012	12:28:24 PM	PH3 valve closed
10/17/2012	12:28:24 PM	SiCl4 pre valve closed
10/17/2012	12:28:24 PM	SiCl4 post valve closed
10/17/2012	12:28:24 PM	Main Vac valve closed
10/17/2012	12:28:24 PM	Bypass valve closed
10/17/2012	12:28:24 PM	Bubbler valve closed
10/17/2012	12:28:24 PM	Helium MFC set to  0.000000
10/17/2012	12:28:24 PM	H2 MFC set to  0.000000
10/17/2012	12:28:24 PM	BCl3 MFC set to  0.000000
10/17/2012	12:28:24 PM	PH3 MFC set to  0.000000
10/17/2012	12:28:24 PM	SiCl4 MFC set to  0.000000
10/17/2012	12:28:24 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	12:28:25 PM	Tube furnace set to 0
10/17/2012	12:28:28 PM	H2 valve closed
10/17/2012	12:28:28 PM	BCl3 valve closed
10/17/2012	12:28:28 PM	PH3 valve closed
10/17/2012	12:28:28 PM	SiCl4 pre valve closed
10/17/2012	12:28:28 PM	SiCl4 post valve closed
10/17/2012	12:28:28 PM	Main Vac valve closed
10/17/2012	12:28:28 PM	Bypass valve closed
10/17/2012	12:28:28 PM	Bubbler valve closed
10/17/2012	12:28:28 PM	Helium valve opened
10/17/2012	12:28:28 PM	Helium MFC set to  500.000000
10/17/2012	12:28:28 PM	H2 MFC set to  0.000000
10/17/2012	12:28:28 PM	BCl3 MFC set to  0.000000
10/17/2012	12:28:28 PM	PH3 MFC set to  0.000000
10/17/2012	12:28:28 PM	SiCl4 MFC set to  0.000000
10/17/2012	12:28:28 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	12:28:28 PM	Tube furnace set to 0
10/17/2012	12:29:40 PM	Helium valve closed
10/17/2012	12:29:40 PM	H2 valve closed
10/17/2012	12:29:40 PM	BCl3 valve closed
10/17/2012	12:29:40 PM	PH3 valve closed
10/17/2012	12:29:40 PM	SiCl4 pre valve closed
10/17/2012	12:29:40 PM	SiCl4 post valve closed
10/17/2012	12:29:40 PM	Main Vac valve closed
10/17/2012	12:29:40 PM	Bypass valve closed
10/17/2012	12:29:40 PM	Bubbler valve closed
10/17/2012	12:29:40 PM	Helium MFC set to  0.000000
10/17/2012	12:29:40 PM	H2 MFC set to  0.000000
10/17/2012	12:29:40 PM	BCl3 MFC set to  0.000000
10/17/2012	12:29:40 PM	PH3 MFC set to  0.000000
10/17/2012	12:29:40 PM	SiCl4 MFC set to  0.000000
10/17/2012	12:29:40 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	12:29:40 PM	Tube furnace set to 0
10/17/2012	12:29:41 PM	Run finished at 12:29 PM
10/17/2012	12:29:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/17/2012	12:33:40 PM	Tube furnace set to 200
10/17/2012	12:33:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2012	12:33:43 PM	Recipe started at 12:33 PM
10/17/2012	12:33:43 PM	Helium valve closed
10/17/2012	12:33:43 PM	H2 valve closed
10/17/2012	12:33:43 PM	BCl3 valve closed
10/17/2012	12:33:43 PM	PH3 valve closed
10/17/2012	12:33:43 PM	SiCl4 pre valve closed
10/17/2012	12:33:43 PM	SiCl4 post valve closed
10/17/2012	12:33:43 PM	Main Vac valve closed
10/17/2012	12:33:43 PM	Bubbler valve closed
10/17/2012	12:33:43 PM	Bypass valve opened
10/17/2012	12:33:43 PM	Helium MFC set to  0.000000
10/17/2012	12:33:43 PM	H2 MFC set to  0.000000
10/17/2012	12:33:43 PM	BCl3 MFC set to  0.000000
10/17/2012	12:33:43 PM	PH3 MFC set to  0.000000
10/17/2012	12:33:43 PM	SiCl4 MFC set to  0.000000
10/17/2012	12:33:43 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	12:33:43 PM	Tube furnace set to 0
10/17/2012	12:35:06 PM	Helium valve closed
10/17/2012	12:35:06 PM	H2 valve closed
10/17/2012	12:35:06 PM	BCl3 valve closed
10/17/2012	12:35:06 PM	PH3 valve closed
10/17/2012	12:35:06 PM	SiCl4 pre valve closed
10/17/2012	12:35:06 PM	SiCl4 post valve closed
10/17/2012	12:35:06 PM	Main Vac valve closed
10/17/2012	12:35:06 PM	Bubbler valve closed
10/17/2012	12:35:06 PM	Bypass valve opened
10/17/2012	12:35:06 PM	Helium MFC set to  0.000000
10/17/2012	12:35:06 PM	H2 MFC set to  0.000000
10/17/2012	12:35:06 PM	BCl3 MFC set to  0.000000
10/17/2012	12:35:06 PM	PH3 MFC set to  0.000000
10/17/2012	12:35:06 PM	SiCl4 MFC set to  0.000000
10/17/2012	12:35:06 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	12:35:06 PM	Tube furnace set to 0
10/17/2012	12:36:06 PM	Helium valve closed
10/17/2012	12:36:06 PM	H2 valve closed
10/17/2012	12:36:06 PM	BCl3 valve closed
10/17/2012	12:36:06 PM	PH3 valve closed
10/17/2012	12:36:06 PM	SiCl4 pre valve closed
10/17/2012	12:36:06 PM	SiCl4 post valve closed
10/17/2012	12:36:06 PM	Bypass valve closed
10/17/2012	12:36:06 PM	Bubbler valve closed
10/17/2012	12:36:06 PM	Main Vac valve opened
10/17/2012	12:36:06 PM	Helium MFC set to  0.000000
10/17/2012	12:36:06 PM	H2 MFC set to  0.000000
10/17/2012	12:36:06 PM	BCl3 MFC set to  0.000000
10/17/2012	12:36:06 PM	PH3 MFC set to  0.000000
10/17/2012	12:36:06 PM	SiCl4 MFC set to  0.000000
10/17/2012	12:36:06 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	12:36:06 PM	Tube furnace set to 0
10/17/2012	12:36:07 PM	Run finished at 12:36 PM
10/17/2012	12:36:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2012	2:22:42 PM	Tube furnace set to 200
10/17/2012	2:46:48 PM	Recipe started at 2:46 PM
10/17/2012	2:46:48 PM	Helium valve closed
10/17/2012	2:46:48 PM	H2 valve closed
10/17/2012	2:46:48 PM	BCl3 valve closed
10/17/2012	2:46:48 PM	PH3 valve closed
10/17/2012	2:46:48 PM	SiCl4 pre valve closed
10/17/2012	2:46:48 PM	SiCl4 post valve closed
10/17/2012	2:46:48 PM	Main Vac valve closed
10/17/2012	2:46:48 PM	Bypass valve closed
10/17/2012	2:46:48 PM	Bubbler valve closed
10/17/2012	2:46:48 PM	Helium MFC set to  0.000000
10/17/2012	2:46:48 PM	H2 MFC set to  0.000000
10/17/2012	2:46:48 PM	BCl3 MFC set to  0.000000
10/17/2012	2:46:48 PM	PH3 MFC set to  0.000000
10/17/2012	2:46:48 PM	SiCl4 MFC set to  0.000000
10/17/2012	2:46:48 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	2:46:48 PM	Tube furnace set to 0
10/17/2012	2:46:51 PM	Helium valve closed
10/17/2012	2:46:51 PM	BCl3 valve closed
10/17/2012	2:46:51 PM	PH3 valve closed
10/17/2012	2:46:51 PM	SiCl4 pre valve closed
10/17/2012	2:46:51 PM	SiCl4 post valve closed
10/17/2012	2:46:51 PM	Main Vac valve closed
10/17/2012	2:46:51 PM	Bypass valve closed
10/17/2012	2:46:51 PM	Bubbler valve closed
10/17/2012	2:46:51 PM	H2 valve opened
10/17/2012	2:46:51 PM	Helium MFC set to  0.000000
10/17/2012	2:46:51 PM	H2 MFC set to  500.000000
10/17/2012	2:46:51 PM	BCl3 MFC set to  0.000000
10/17/2012	2:46:51 PM	PH3 MFC set to  0.000000
10/17/2012	2:46:51 PM	SiCl4 MFC set to  0.000000
10/17/2012	2:46:51 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	2:46:51 PM	Tube furnace set to 0
10/17/2012	2:48:03 PM	Helium valve closed
10/17/2012	2:48:03 PM	BCl3 valve closed
10/17/2012	2:48:03 PM	PH3 valve closed
10/17/2012	2:48:03 PM	SiCl4 pre valve closed
10/17/2012	2:48:03 PM	SiCl4 post valve closed
10/17/2012	2:48:03 PM	Main Vac valve closed
10/17/2012	2:48:03 PM	Bypass valve closed
10/17/2012	2:48:03 PM	H2 valve opened
10/17/2012	2:48:03 PM	Bubbler valve opened
10/17/2012	2:48:03 PM	Helium MFC set to  0.000000
10/17/2012	2:48:03 PM	H2 MFC set to  500.000000
10/17/2012	2:48:03 PM	BCl3 MFC set to  0.000000
10/17/2012	2:48:03 PM	PH3 MFC set to  0.000000
10/17/2012	2:48:03 PM	SiCl4 MFC set to  0.000000
10/17/2012	2:48:03 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	2:48:03 PM	Tube furnace set to 0
10/17/2012	2:48:04 PM	Helium valve closed
10/17/2012	2:48:04 PM	BCl3 valve closed
10/17/2012	2:48:04 PM	PH3 valve closed
10/17/2012	2:48:04 PM	SiCl4 pre valve closed
10/17/2012	2:48:04 PM	SiCl4 post valve closed
10/17/2012	2:48:04 PM	Main Vac valve closed
10/17/2012	2:48:04 PM	Bypass valve closed
10/17/2012	2:48:04 PM	H2 valve opened
10/17/2012	2:48:04 PM	Bubbler valve opened
10/17/2012	2:48:04 PM	Helium MFC set to  0.000000
10/17/2012	2:48:04 PM	H2 MFC set to  500.000000
10/17/2012	2:48:04 PM	BCl3 MFC set to  0.000000
10/17/2012	2:48:04 PM	PH3 MFC set to  0.000000
10/17/2012	2:48:04 PM	SiCl4 MFC set to  0.000000
10/17/2012	2:48:04 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	2:48:05 PM	Tube furnace set to 1000
10/17/2012	3:08:04 PM	Helium valve closed
10/17/2012	3:08:04 PM	PH3 valve closed
10/17/2012	3:08:04 PM	Main Vac valve closed
10/17/2012	3:08:04 PM	Bypass valve closed
10/17/2012	3:08:04 PM	H2 valve opened
10/17/2012	3:08:04 PM	BCl3 valve opened
10/17/2012	3:08:04 PM	SiCl4 pre valve opened
10/17/2012	3:08:04 PM	SiCl4 post valve opened
10/17/2012	3:08:04 PM	Bubbler valve opened
10/17/2012	3:08:04 PM	Helium MFC set to  0.000000
10/17/2012	3:08:05 PM	H2 MFC set to  450.000000
10/17/2012	3:08:05 PM	BCl3 MFC set to  1.500000
10/17/2012	3:08:05 PM	PH3 MFC set to  0.000000
10/17/2012	3:08:05 PM	SiCl4 MFC set to  50.000000
10/17/2012	3:08:05 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	3:08:05 PM	Tube furnace set to 1000
10/17/2012	3:28:05 PM	Helium valve closed
10/17/2012	3:28:05 PM	BCl3 valve closed
10/17/2012	3:28:05 PM	PH3 valve closed
10/17/2012	3:28:05 PM	SiCl4 pre valve closed
10/17/2012	3:28:05 PM	SiCl4 post valve closed
10/17/2012	3:28:05 PM	Main Vac valve closed
10/17/2012	3:28:05 PM	Bypass valve closed
10/17/2012	3:28:05 PM	H2 valve opened
10/17/2012	3:28:05 PM	Bubbler valve opened
10/17/2012	3:28:05 PM	Helium MFC set to  0.000000
10/17/2012	3:28:05 PM	H2 MFC set to  500.000000
10/17/2012	3:28:05 PM	BCl3 MFC set to  0.000000
10/17/2012	3:28:05 PM	PH3 MFC set to  0.000000
10/17/2012	3:28:05 PM	SiCl4 MFC set to  0.000000
10/17/2012	3:28:05 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	3:28:05 PM	Tube furnace set to 950
10/17/2012	3:30:05 PM	Helium valve closed
10/17/2012	3:30:05 PM	BCl3 valve closed
10/17/2012	3:30:05 PM	PH3 valve closed
10/17/2012	3:30:05 PM	SiCl4 pre valve closed
10/17/2012	3:30:05 PM	SiCl4 post valve closed
10/17/2012	3:30:05 PM	Main Vac valve closed
10/17/2012	3:30:05 PM	Bypass valve closed
10/17/2012	3:30:05 PM	H2 valve opened
10/17/2012	3:30:05 PM	Bubbler valve opened
10/17/2012	3:30:05 PM	Helium MFC set to  0.000000
10/17/2012	3:30:05 PM	H2 MFC set to  500.000000
10/17/2012	3:30:05 PM	BCl3 MFC set to  0.000000
10/17/2012	3:30:05 PM	PH3 MFC set to  0.000000
10/17/2012	3:30:05 PM	SiCl4 MFC set to  0.000000
10/17/2012	3:30:05 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	3:30:05 PM	Tube furnace set to 900
10/17/2012	3:32:05 PM	Helium valve closed
10/17/2012	3:32:05 PM	BCl3 valve closed
10/17/2012	3:32:05 PM	PH3 valve closed
10/17/2012	3:32:05 PM	SiCl4 pre valve closed
10/17/2012	3:32:05 PM	SiCl4 post valve closed
10/17/2012	3:32:05 PM	Main Vac valve closed
10/17/2012	3:32:05 PM	Bypass valve closed
10/17/2012	3:32:05 PM	H2 valve opened
10/17/2012	3:32:05 PM	Bubbler valve opened
10/17/2012	3:32:05 PM	Helium MFC set to  0.000000
10/17/2012	3:32:05 PM	H2 MFC set to  500.000000
10/17/2012	3:32:05 PM	BCl3 MFC set to  0.000000
10/17/2012	3:32:05 PM	PH3 MFC set to  0.000000
10/17/2012	3:32:05 PM	SiCl4 MFC set to  0.000000
10/17/2012	3:32:05 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	3:32:05 PM	Tube furnace set to 850
10/17/2012	3:34:05 PM	H2 valve closed
10/17/2012	3:34:05 PM	BCl3 valve closed
10/17/2012	3:34:05 PM	PH3 valve closed
10/17/2012	3:34:05 PM	SiCl4 pre valve closed
10/17/2012	3:34:05 PM	SiCl4 post valve closed
10/17/2012	3:34:05 PM	Main Vac valve closed
10/17/2012	3:34:05 PM	Bypass valve closed
10/17/2012	3:34:05 PM	Helium valve opened
10/17/2012	3:34:05 PM	Bubbler valve opened
10/17/2012	3:34:05 PM	Helium MFC set to  500.000000
10/17/2012	3:34:05 PM	H2 MFC set to  0.000000
10/17/2012	3:34:05 PM	BCl3 MFC set to  0.000000
10/17/2012	3:34:05 PM	PH3 MFC set to  0.000000
10/17/2012	3:34:05 PM	SiCl4 MFC set to  0.000000
10/17/2012	3:34:05 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	3:34:06 PM	Tube furnace set to 800
10/17/2012	3:36:06 PM	H2 valve closed
10/17/2012	3:36:06 PM	BCl3 valve closed
10/17/2012	3:36:06 PM	PH3 valve closed
10/17/2012	3:36:06 PM	SiCl4 pre valve closed
10/17/2012	3:36:06 PM	SiCl4 post valve closed
10/17/2012	3:36:06 PM	Main Vac valve closed
10/17/2012	3:36:06 PM	Bypass valve closed
10/17/2012	3:36:06 PM	Helium valve opened
10/17/2012	3:36:06 PM	Bubbler valve opened
10/17/2012	3:36:06 PM	Helium MFC set to  500.000000
10/17/2012	3:36:06 PM	H2 MFC set to  0.000000
10/17/2012	3:36:06 PM	BCl3 MFC set to  0.000000
10/17/2012	3:36:06 PM	PH3 MFC set to  0.000000
10/17/2012	3:36:06 PM	SiCl4 MFC set to  0.000000
10/17/2012	3:36:06 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	3:36:06 PM	Tube furnace set to 750
10/17/2012	3:38:06 PM	H2 valve closed
10/17/2012	3:38:06 PM	BCl3 valve closed
10/17/2012	3:38:06 PM	PH3 valve closed
10/17/2012	3:38:06 PM	SiCl4 pre valve closed
10/17/2012	3:38:06 PM	SiCl4 post valve closed
10/17/2012	3:38:06 PM	Main Vac valve closed
10/17/2012	3:38:06 PM	Bypass valve closed
10/17/2012	3:38:06 PM	Helium valve opened
10/17/2012	3:38:06 PM	Bubbler valve opened
10/17/2012	3:38:06 PM	Helium MFC set to  500.000000
10/17/2012	3:38:06 PM	H2 MFC set to  0.000000
10/17/2012	3:38:06 PM	BCl3 MFC set to  0.000000
10/17/2012	3:38:06 PM	PH3 MFC set to  0.000000
10/17/2012	3:38:06 PM	SiCl4 MFC set to  0.000000
10/17/2012	3:38:06 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	3:38:06 PM	Tube furnace set to 0
10/17/2012	3:58:06 PM	Helium valve closed
10/17/2012	3:58:06 PM	H2 valve closed
10/17/2012	3:58:06 PM	BCl3 valve closed
10/17/2012	3:58:06 PM	PH3 valve closed
10/17/2012	3:58:06 PM	SiCl4 pre valve closed
10/17/2012	3:58:06 PM	SiCl4 post valve closed
10/17/2012	3:58:06 PM	Main Vac valve closed
10/17/2012	3:58:06 PM	Bypass valve closed
10/17/2012	3:58:06 PM	Bubbler valve closed
10/17/2012	3:58:06 PM	Helium MFC set to  0.000000
10/17/2012	3:58:06 PM	H2 MFC set to  0.000000
10/17/2012	3:58:06 PM	BCl3 MFC set to  0.000000
10/17/2012	3:58:06 PM	PH3 MFC set to  0.000000
10/17/2012	3:58:06 PM	SiCl4 MFC set to  0.000000
10/17/2012	3:58:06 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	3:58:06 PM	Tube furnace set to 0
10/17/2012	3:58:07 PM	Helium valve closed
10/17/2012	3:58:07 PM	H2 valve closed
10/17/2012	3:58:07 PM	BCl3 valve closed
10/17/2012	3:58:07 PM	PH3 valve closed
10/17/2012	3:58:07 PM	SiCl4 pre valve closed
10/17/2012	3:58:07 PM	SiCl4 post valve closed
10/17/2012	3:58:07 PM	Main Vac valve closed
10/17/2012	3:58:07 PM	Bubbler valve closed
10/17/2012	3:58:07 PM	Bypass valve opened
10/17/2012	3:58:07 PM	Helium MFC set to  0.000000
10/17/2012	3:58:07 PM	H2 MFC set to  0.000000
10/17/2012	3:58:07 PM	BCl3 MFC set to  0.000000
10/17/2012	3:58:07 PM	PH3 MFC set to  0.000000
10/17/2012	3:58:07 PM	SiCl4 MFC set to  0.000000
10/17/2012	3:58:07 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	3:58:08 PM	Tube furnace set to 0
10/17/2012	3:59:10 PM	Helium valve closed
10/17/2012	3:59:10 PM	H2 valve closed
10/17/2012	3:59:10 PM	BCl3 valve closed
10/17/2012	3:59:10 PM	PH3 valve closed
10/17/2012	3:59:10 PM	SiCl4 pre valve closed
10/17/2012	3:59:10 PM	SiCl4 post valve closed
10/17/2012	3:59:10 PM	Main Vac valve closed
10/17/2012	3:59:10 PM	Bubbler valve closed
10/17/2012	3:59:10 PM	Bypass valve opened
10/17/2012	3:59:10 PM	Helium MFC set to  0.000000
10/17/2012	3:59:10 PM	H2 MFC set to  0.000000
10/17/2012	3:59:10 PM	BCl3 MFC set to  0.000000
10/17/2012	3:59:10 PM	PH3 MFC set to  0.000000
10/17/2012	3:59:10 PM	SiCl4 MFC set to  0.000000
10/17/2012	3:59:10 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	3:59:11 PM	Tube furnace set to 0
10/17/2012	4:00:11 PM	Helium valve closed
10/17/2012	4:00:11 PM	H2 valve closed
10/17/2012	4:00:11 PM	BCl3 valve closed
10/17/2012	4:00:11 PM	PH3 valve closed
10/17/2012	4:00:11 PM	SiCl4 pre valve closed
10/17/2012	4:00:11 PM	SiCl4 post valve closed
10/17/2012	4:00:11 PM	Bypass valve closed
10/17/2012	4:00:11 PM	Bubbler valve closed
10/17/2012	4:00:11 PM	Main Vac valve opened
10/17/2012	4:00:11 PM	Helium MFC set to  0.000000
10/17/2012	4:00:11 PM	H2 MFC set to  0.000000
10/17/2012	4:00:11 PM	BCl3 MFC set to  0.000000
10/17/2012	4:00:11 PM	PH3 MFC set to  0.000000
10/17/2012	4:00:11 PM	SiCl4 MFC set to  0.000000
10/17/2012	4:00:11 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	4:00:11 PM	Tube furnace set to 0
10/17/2012	4:00:12 PM	Run finished at 4:00 PM
10/17/2012	4:41:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/17/2012	4:41:18 PM	Recipe started at 4:41 PM
10/17/2012	4:41:18 PM	Helium valve closed
10/17/2012	4:41:18 PM	H2 valve closed
10/17/2012	4:41:18 PM	BCl3 valve closed
10/17/2012	4:41:18 PM	PH3 valve closed
10/17/2012	4:41:18 PM	SiCl4 pre valve closed
10/17/2012	4:41:18 PM	SiCl4 post valve closed
10/17/2012	4:41:18 PM	Main Vac valve closed
10/17/2012	4:41:18 PM	Bypass valve closed
10/17/2012	4:41:18 PM	Bubbler valve closed
10/17/2012	4:41:18 PM	Helium MFC set to  0.000000
10/17/2012	4:41:18 PM	H2 MFC set to  0.000000
10/17/2012	4:41:18 PM	BCl3 MFC set to  0.000000
10/17/2012	4:41:18 PM	PH3 MFC set to  0.000000
10/17/2012	4:41:18 PM	SiCl4 MFC set to  0.000000
10/17/2012	4:41:18 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	4:41:18 PM	Tube furnace set to 0
10/17/2012	4:41:21 PM	H2 valve closed
10/17/2012	4:41:21 PM	BCl3 valve closed
10/17/2012	4:41:21 PM	PH3 valve closed
10/17/2012	4:41:21 PM	SiCl4 pre valve closed
10/17/2012	4:41:21 PM	SiCl4 post valve closed
10/17/2012	4:41:21 PM	Main Vac valve closed
10/17/2012	4:41:21 PM	Bypass valve closed
10/17/2012	4:41:21 PM	Bubbler valve closed
10/17/2012	4:41:21 PM	Helium valve opened
10/17/2012	4:41:21 PM	Helium MFC set to  500.000000
10/17/2012	4:41:21 PM	H2 MFC set to  0.000000
10/17/2012	4:41:21 PM	BCl3 MFC set to  0.000000
10/17/2012	4:41:21 PM	PH3 MFC set to  0.000000
10/17/2012	4:41:21 PM	SiCl4 MFC set to  0.000000
10/17/2012	4:41:21 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	4:41:21 PM	Tube furnace set to 0
10/17/2012	4:42:24 PM	Helium valve closed
10/17/2012	4:42:24 PM	H2 valve closed
10/17/2012	4:42:24 PM	BCl3 valve closed
10/17/2012	4:42:24 PM	PH3 valve closed
10/17/2012	4:42:24 PM	SiCl4 pre valve closed
10/17/2012	4:42:24 PM	SiCl4 post valve closed
10/17/2012	4:42:24 PM	Main Vac valve closed
10/17/2012	4:42:24 PM	Bypass valve closed
10/17/2012	4:42:24 PM	Bubbler valve closed
10/17/2012	4:42:24 PM	Helium MFC set to  0.000000
10/17/2012	4:42:24 PM	H2 MFC set to  0.000000
10/17/2012	4:42:24 PM	BCl3 MFC set to  0.000000
10/17/2012	4:42:24 PM	PH3 MFC set to  0.000000
10/17/2012	4:42:24 PM	SiCl4 MFC set to  0.000000
10/17/2012	4:42:24 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	4:42:24 PM	Tube furnace set to 0
10/17/2012	4:42:25 PM	Run finished at 4:42 PM
10/17/2012	4:42:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/17/2012	4:51:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2012	4:51:25 PM	Recipe started at 4:51 PM
10/17/2012	4:51:25 PM	Helium valve closed
10/17/2012	4:51:25 PM	H2 valve closed
10/17/2012	4:51:25 PM	BCl3 valve closed
10/17/2012	4:51:25 PM	PH3 valve closed
10/17/2012	4:51:25 PM	SiCl4 pre valve closed
10/17/2012	4:51:25 PM	SiCl4 post valve closed
10/17/2012	4:51:25 PM	Main Vac valve closed
10/17/2012	4:51:25 PM	Bubbler valve closed
10/17/2012	4:51:25 PM	Bypass valve opened
10/17/2012	4:51:25 PM	Helium MFC set to  0.000000
10/17/2012	4:51:25 PM	H2 MFC set to  0.000000
10/17/2012	4:51:25 PM	BCl3 MFC set to  0.000000
10/17/2012	4:51:25 PM	PH3 MFC set to  0.000000
10/17/2012	4:51:25 PM	SiCl4 MFC set to  0.000000
10/17/2012	4:51:25 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	4:51:25 PM	Tube furnace set to 0
10/17/2012	4:53:24 PM	Helium valve closed
10/17/2012	4:53:24 PM	H2 valve closed
10/17/2012	4:53:24 PM	BCl3 valve closed
10/17/2012	4:53:24 PM	PH3 valve closed
10/17/2012	4:53:24 PM	SiCl4 pre valve closed
10/17/2012	4:53:24 PM	SiCl4 post valve closed
10/17/2012	4:53:24 PM	Main Vac valve closed
10/17/2012	4:53:24 PM	Bubbler valve closed
10/17/2012	4:53:24 PM	Bypass valve opened
10/17/2012	4:53:24 PM	Helium MFC set to  0.000000
10/17/2012	4:53:24 PM	H2 MFC set to  0.000000
10/17/2012	4:53:24 PM	BCl3 MFC set to  0.000000
10/17/2012	4:53:24 PM	PH3 MFC set to  0.000000
10/17/2012	4:53:24 PM	SiCl4 MFC set to  0.000000
10/17/2012	4:53:24 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	4:53:24 PM	Tube furnace set to 0
10/17/2012	4:54:24 PM	Helium valve closed
10/17/2012	4:54:24 PM	H2 valve closed
10/17/2012	4:54:24 PM	BCl3 valve closed
10/17/2012	4:54:24 PM	PH3 valve closed
10/17/2012	4:54:24 PM	SiCl4 pre valve closed
10/17/2012	4:54:24 PM	SiCl4 post valve closed
10/17/2012	4:54:24 PM	Bypass valve closed
10/17/2012	4:54:24 PM	Bubbler valve closed
10/17/2012	4:54:24 PM	Main Vac valve opened
10/17/2012	4:54:24 PM	Helium MFC set to  0.000000
10/17/2012	4:54:24 PM	H2 MFC set to  0.000000
10/17/2012	4:54:25 PM	BCl3 MFC set to  0.000000
10/17/2012	4:54:25 PM	PH3 MFC set to  0.000000
10/17/2012	4:54:25 PM	SiCl4 MFC set to  0.000000
10/17/2012	4:54:25 PM	Bypass solenoid MFC set to  0.000000
10/17/2012	4:54:25 PM	Tube furnace set to 0
10/17/2012	4:54:26 PM	Run finished at 4:54 PM
10/17/2012	4:54:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
